JPH0378056U - - Google Patents
Info
- Publication number
- JPH0378056U JPH0378056U JP13808189U JP13808189U JPH0378056U JP H0378056 U JPH0378056 U JP H0378056U JP 13808189 U JP13808189 U JP 13808189U JP 13808189 U JP13808189 U JP 13808189U JP H0378056 U JPH0378056 U JP H0378056U
- Authority
- JP
- Japan
- Prior art keywords
- substrate holder
- vapor deposition
- deposition apparatus
- evaporation source
- sphere
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 6
- 238000007740 vapor deposition Methods 0.000 claims description 4
- 230000008020 evaporation Effects 0.000 claims description 3
- 238000001704 evaporation Methods 0.000 claims description 3
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13808189U JPH0378056U (en]) | 1989-11-30 | 1989-11-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13808189U JPH0378056U (en]) | 1989-11-30 | 1989-11-30 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0378056U true JPH0378056U (en]) | 1991-08-07 |
Family
ID=31685208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13808189U Pending JPH0378056U (en]) | 1989-11-30 | 1989-11-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0378056U (en]) |
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1989
- 1989-11-30 JP JP13808189U patent/JPH0378056U/ja active Pending